Contents
SECTION I Fundamentals of Optical Elements and Devices
Natalia Dushkina
Chapter 2 Lenses, Prisms, and Mirrors
Peter R. Hall
Chapter 3 Optoelectronic Sensors
Motohiro Suyama
Chapter 4 Optical Devices and Optomechanical Elements
Akihiko Chaki and Kenji Magara
SECTION II Fundamentals of Principles and Techniques for Metrology
Chapter 5 Propagation of Light
Natalia Dushkina
David A. Page
Giancarlo Pedrini
Chapter 8 Speckle Methods and Applications
Nandigana Krishna Mohan
Lianhua Jin and Toru Yoshizawa
Chapter 10 Optical Heterodyne Measurement Method
Masao Hirano
Toru Yoshizawa
Lev T. Perelman
Michael Shribak
Wenhao Huang, Xi Li, and Guoyong Zhang
SECTION III Practical Applications
René Schödel
Akiko Hirai, Mariko Kajima, and Souichi Telada
Chapter 17 Straightness and Alignment
Ruedi Thalmann
Toshiyuki Takatsuji and Youichi Bitou
Chapter 19 Surface Profilometry
Toru Yoshizawa and Toshitaka Wakayama
Chapter 20 Three-Dimensional Shape Measurement
Frank Chen, Gordon M. Brown, and Mumin Song
Jun-ichi Kato
Nobuo Kochi
Chapter 23 Optical Methods in Solid Mechanics
Anand Asundi
Chapter 24 Optical Methods in Flow Measurement
Sang Joon Lee
Baoliang (Bob) Wang
Chapter 26 Birefringence Measurement
Yukitoshi Otani
Hiroyuki Fujiwara
Chapter 28 Optical Thin Film and Coatings
Cheng-Chung Lee and Shigetaro Ogura
Chapter 29 Film Surface and Thickness Profilometry
Katsuichi Kitagawa
Chapter 30 Optical Coherence Tomography for Industrial Applications
Tatsuo Shiina
Chapter 31 Interference Microscopy for Surface Structure Analysis
Peter J. de Groot
Chapter 32 Noncontact Dimensional and Profile Metrology by Video Measurement
Hiroo Tsumuraya and Shuichi Sakai
Chapter 33 Optical Metrology in Manufacturing Technology
Rainer Tutsch
Chapter 34 On-Machine Measurements
Takashi Nomura and Kazuhide Kamiya